WU Chaoyan¹; WEI Chenjun²; YANG Lifeng²; SUO Xian³;

Abstract：

High-purity electronic chemicals are specialized in semiconductors, flat-panel displays, photovoltaics and other advanced industries. It raises high requirements on both high purity and high quality, yet encounters the low localization rates in China. This review uncovers the kinds, functions, preparation and quality requirements of electronic chemicals, such as electronic gas, wet electronic chemicals, photoresist, and highlights the content requirements of purity and trace impurities of critical electronic chemicals. Moreover, this review provides the analysis of industrial scale, competitive landscape, and industry barriers of electronic chemicals in domestic and international markets. It summarizes the research progress of separation technologies (e.g. subboiling distillation, reactive distillation, adsorptive separation, membrane separation) in preparing high-purity electronic chemicals. Furthermore, it highlights the challenges of trace impurities removal in electronic chemicals, and provides the systematic discussions about the mechanisms and advantages/disadvantages of various separation technologies, and the structure-property relationship between separation materials (e.g. adsorption, membrane) and metal ion removal performance. In response to domestic production of electronic chemicals, the review concludes the critical technological challenges that are yet to be addressed in the purification and advance manufacture of electronic chemicals, as well as the importance of integrated development of education, science and technology, and talents in boosting the development of electronic chemicals.

Key Words： electronic chemicals;separation and purification;electronic gas;wet electronic chemicals;photoresist

Abstract:

Keywords:

Foundation: 浙江省"尖兵""领雁"科技计划(2023C01107)。

Authors: WU Chaoyan¹; WEI Chenjun²; YANG Lifeng²; SUO Xian³;

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